VACUUM DRYER, VACUUM DRYING METHOD, AND METHOD FOR SHORTENING THE TIME FOR VACUUM DRYING PROCESS

• Main Authors: SATAKE JUN, OIKAWA JUNJI, NASU TOSHIFUMI, HAYASHI TERUYUKI, UEDA TOSHIHIKO
• Format: Patent
• Language: English; Japanese
• Published: 17.11.2022
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; DRYING; DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEATING; LIGHTING; MECHANICAL ENGINEERING; SEMICONDUCTOR DEVICES; WEAPONS

To shorten the time for posttreatment steps in a vacuum drying process, thus shortening the total time for the whole vacuum drying process.SOLUTION: A vacuum dryer dries a solution on a substrate under reduced pressure. The vacuum dryer has: a treatment vessel that can be decompressed and houses the substrate; an exhaust line that is connected to an exhaust device and exhausts air from the treatment vessel; a solvent trap that traps a solvent in the solution having been vaporized from the substrate and released into the treatment vessel; a protective net that prevents an object from entering the exhaust device through the exhaust line; and a promotive function that promotes the desorption of, from the protective net, the solvent having been vaporized from the substrate upon vacuum drying using the solvent trap and adsorbed onto the protective net.SELECTED DRAWING: Figure 10 【課題】減圧乾燥処理における後処理工程の所要時間を短縮し、減圧乾燥処理全体の所要時間を短縮する。【解決手段】基板上の溶液を減圧状態で乾燥させる減圧乾燥装置であって、減圧可能に構成され、前記基板を収容する処理容器と、排気装置に接続され、前記処理容器内を排気する排気ラインと、前記基板から気化し前記処理容器内に放出された前記溶液中の溶媒を捕集する溶媒捕集部と、物体が前記排気ラインを介して前記排気装置に進入することを防止する保護網と、前記溶媒捕集部を用いた減圧乾燥処理に伴い前記基板から気化し前記保護網に吸着された前記溶媒の、前記保護網からの脱離を促進させる促進機能と、を備える。【選択図】図１０