ACCELERATION SENSOR AND ACCELERATION SENSOR DEVICE

• Main Authors: OTA NORIKAZU, FUJIYOSHI MOTOHIRO, OZAKI TAKASHI
• Format: Patent
• Language: English; Japanese
• Published: 01.11.2022
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

To provide a technique that can increase a change in resonance frequency of beam parts.SOLUTION: An acceleration sensor comprises: a substrate; a mass part that is attached to the substrate; spring parts that support the mass part with respect to the substrate movably in a specific direction; beam parts that extend in the specific direction and are connected with the mass part and the substrate, the beam parts bent with respect to the specific direction and having deformation portions deformed according to the movement of the mass part; excitation electrodes that excite the beam parts; and detection electrodes that detect the frequency of the beam parts.SELECTED DRAWING: Figure 2 【課題】梁部の共振周波数の変化を大きくすることができる技術を提供する。【解決手段】加速度センサは、基板と、前記基板に取り付けられている質量部と、前記質量部を前記基板に対して特定方向に移動可能に支持するばね部と、前記特定方向に延びており、前記質量部と前記基板とに連結される梁部であって、前記特定方向に対して曲がっており、前記質量部の移動に従って変形する変形部分を有する前記梁部と、前記梁部を励振させる励振電極と、前記梁部の周波数を検出する検出電極と、を備える。【選択図】図２