STRAIN-RESISTIVE FILM, PRESSURE SENSOR, AND LAMINATE

• Main Authors: KOBAYASHI MASANORI, UNNO TAKESHI, SASAHARA TETSUYA, NAWAOKA KOHEI
• Format: Patent
• Language: English; Japanese
• Published: 07.10.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; RESISTORS; TESTING

To provide a strain-resistance film containing Cr, Al, and N and preventing film peeling, a laminate, and a pressure sensor using the same.SOLUTION: In a pressure sensor 10 having a laminate 31, a strain resistance film 32 that consists of an alloy material containing Cr, Al, N, and Si, and is represented by the general formula Cr100-x-y-zAlxNySiz, and in which the composition regions of x, y, and z satisfy 5≤x≤50, 1≤y≤20, 0<z is used to preferably prevent film peeling between the strain resistance film 32 and a base insulating layer 52.SELECTED DRAWING: Figure 2 【課題】Ｃｒ、Ａｌ、Ｎを含み膜剥がれを防止する歪抵抗膜、積層体及びこれを用いる圧力センサを提供する。【解決手段】積層体３１を有する圧力センサ１０において、Ｃｒ、Ａｌ、Ｎ、Ｓｉを含む合金材料からなり、一般式Ｃｒ１００－ｘ－ｙ－ｚＡｌｘＮｙＳｉｚで表され、ｘ、ｙ、ｚのそれぞれの組成領域が５≦ｘ≦５０、１≦ｙ≦２０、０＜ｚ、である歪抵抗膜３２を用いることで、歪抵抗膜３２と下地絶縁層５２との間の膜剥がれの問題を好適に防止することができる。【選択図】図２