VACUUM VALVE

To provide a vacuum valve that suppresses residual stress at the junction between an insulating tube and a flange.SOLUTION: A vacuum valve includes a flange having an insulating tube having an end, a tube fixed to the end, and a lid provided on the opposite side of the tube to the end, and a metal r...

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Bibliographic Details
Main Author HIROSE SADAHISA
Format Patent
LanguageEnglish
Japanese
Published 30.09.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
RELAYS
SELECTORS
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Summary:To provide a vacuum valve that suppresses residual stress at the junction between an insulating tube and a flange.SOLUTION: A vacuum valve includes a flange having an insulating tube having an end, a tube fixed to the end, and a lid provided on the opposite side of the tube to the end, and a metal reinforcing portion provided on at least one of the inner surface and the outer surface of the tube, and a difference between the coefficient of thermal expansion of the reinforcing portion and the coefficient of thermal expansion of the insulating tube is smaller than a difference between the coefficient of thermal expansion of the flange and the coefficient of thermal expansion of the insulating tube.SELECTED DRAWING: Figure 2 【課題】絶縁筒とフランジとの接合部分における残留応力を抑制する真空バルブを提供する。【解決手段】端部を有する絶縁筒と前記端部に固定される筒部と、前記筒部の前記端部と反対側に設けられる蓋部とを有するフランジと、前記筒部の内面又は外面の少なくとも一方に設けられる金属製の補強部と、を備え、前記補強部の熱膨張率と前記絶縁筒の熱膨張率との差は、前記フランジの熱膨張率と前記絶縁筒の熱膨張率との差より小さい真空バルブ。【選択図】図２
Bibliography:Application Number: JP20210042596