RETICLE STORAGE POD AND METHOD FOR SECURING RETICLE

• Main Authors: CHUANG CHIA-HO, WEN HSING-MIN, CHIU MINGIEN, HSUEH HSIN-MIN
• Format: Patent
• Language: English; Japanese
• Published: 26.09.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

To provide a reticle storage pod and a method for securing a reticle.SOLUTION: The present invention discloses a reticle storage pod including an outer pod which includes an outer cover and an outer base. The outer cover and the outer base can be coupled to securely accommodate one of a first inner pod and a second inner pod that are differently structured in the outer pod. The first inner pod and the second inner pod are used for individually accommodating a reticle. The outer cover is provided with at least one first hold-down mechanism and at least one second hold-down mechanism, and the first hold-down mechanism and the second hold-down mechanism respectively act on a cover of the first inner pod and a cover of the second inner pod that are differently structured.SELECTED DRAWING: Figure 5A 【課題】レチクル保管ポッド及びレチクルの保持方法を提供することを課題とする。【解決手段】本発明は、外側蓋体と、外側ベース部とを備えた外側ポッドを含むレチクル保管ポッドを開示する。前記外側蓋体と外側ベース部とが結合して、異なる構造の第１内側ポッド又は第２内側ポッドのいずれかを前記外側ポッド内に安定して収容することができる。前記第１内側ポッド及び前記第２内側ポッドは、レチクルを各々収容するために用いられる。前記外側蓋体には、少なくとも１つの第１ホールドダウン機構及び少なくとも１つの第２ホールドダウン機構が設けられ、前記第１ホールドダウン機構及び前記第２ホールドダウン機構は前記異なる構造の第１内側ポッドの蓋体及び第２内側ポッドの蓋体に各々作用する。【選択図】図５Ａ