SPECTROSCOPIC MEASUREMENT DEVICE

• Main Authors: WATANABE MASAHIRO, CHANG KE-BONG, BABA SHUICHI, HIROSE TAKESHI
• Format: Patent
• Language: English; Japanese
• Published: 15.09.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

To provide a spectroscopic measurement device that enables enhancing detection sensitivity to a change in physical property value such as an expansion of a sample and the like to which an energy is given by an infrared-ray and the like.SOLUTION: A spectroscopic measurement device comprises: a stage 112 in which a sample 113 is installed; an energy source 100 that generates an energy beam 500 with which a prescribed area of the sample is irradiated; an electromagnetic wave source 120 that generates an electromagnetic wave 501 with which the sample is irradiated; an objective lens 111 that converges the electromagnetic wave into the prescribed area thereof; two confocal detectors 127 and 129 that detect the electromagnetic wave to be reflected upon the sample; and a calculation unit 305 that calculates a change in physical property value of the sample when the prescribed area is irradiated with the energy beam on the basis of each output of the confocal detectors.SELECTED DRAWING: Figure 1 【課題】赤外線等でエネルギー付与される試料の膨張等の物性値の変化に対する検出感度を向上可能な分光測定装置を提供する。【解決手段】試料１１３が設置されるステージ１１２と、試料の所定領域に照射するエネルギービーム５００を発生するエネルギー源１００と、試料に照射する電磁波５０１を発生する電磁波源１２０と、所定領域の中に電磁波を集束させる対物レンズ１１１と、試料で反射する電磁波を検出する二つの共焦点検出器１２７，１２９と、共焦点検出器の各出力に基づいて、所定領域にエネルギービームが照射されたときの試料の物性値の変化を算出する算出部３０５を備えることを特徴とする分光測定装置である。【選択図】図１