EVACUATION METHOD AND EVACUATION SYSTEM

To provide an evacuation method that can solve a problem associated with introduction of inert gas while restraining formation of a by-product.SOLUTION: An evacuation method includes an increase step of increasing a rotation speed of a vacuum pump device DP to a predetermined stable speed after star...

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Bibliographic Details
Main Authors HOZUMI TAKASHI, SASAKI SHINICHIRO, SHIOKAWA ATSUSHI
Format Patent
LanguageEnglish
Japanese
Published 07.09.2022
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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