EVACUATION METHOD AND EVACUATION SYSTEM

To provide an evacuation method that can solve a problem associated with introduction of inert gas while restraining formation of a by-product.SOLUTION: An evacuation method includes an increase step of increasing a rotation speed of a vacuum pump device DP to a predetermined stable speed after star...

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Bibliographic Details
Main Authors HOZUMI TAKASHI, SASAKI SHINICHIRO, SHIOKAWA ATSUSHI
Format Patent
LanguageEnglish
Japanese
Published 07.09.2022
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:To provide an evacuation method that can solve a problem associated with introduction of inert gas while restraining formation of a by-product.SOLUTION: An evacuation method includes an increase step of increasing a rotation speed of a vacuum pump device DP to a predetermined stable speed after starting the vacuum pump device DP, and a gas introduction step of introducing inert gas into the vacuum pump device DP after the rotation speed of the vacuum pump device DP reaches the stable speed.SELECTED DRAWING: Figure 1 【課題】副生成物の生成を抑制しつつ、不活性ガスの導入に伴う問題を解決することができる真空排気方法が提供される。【解決手段】真空排気方法は、真空ポンプ装置ＤＰを起動した後、真空ポンプ装置ＤＰの回転速度を所定の安定速度まで上昇させる上昇工程と、真空ポンプ装置ＤＰの回転速度が安定速度に到達した後に、不活性ガスを真空ポンプ装置ＤＰに導入するガス導入工程と、を含む。【選択図】図１
Bibliography:Application Number: JP20210029379