INSPECTION DEVICE AND WAVE SURFACE ABERRATION MEASUREMENT METHOD

• Main Authors: OZAWA KEN, KOMATSU AKIHIRO
• Format: Patent
• Language: English; Japanese
• Published: 06.09.2022
• Subjects: MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

To provide an inspection device and a wave surface aberration measurement method that can measure the wave surface aberration instantly at high accuracy.SOLUTION: An inspection device 1 according to an embodiment includes a stage 10 on which a specimen 11 is disposed at the inspection and a point light source is disposed at the measurement of the aberration, an object lens 20 that transmits inspection light L1 resulting from reflection of illumination light L0 on the specimen 11 at the inspection, and measurement light L2 from the point light source at the measurement of the aberration, a pupil relay lens 21 that transmits the inspection light L1 and the measurement light L2 and has the focal distance longer than that of the object lens 20, a pupil relay lens 22 that forms an intermediate imaging surface between the pupil relay lens 21 and the pupil relay lens 22, a diffraction grating 40 that is disposed between the pupil relay lens 21 and the intermediate imaging surface and that diffracts the measurement light L2, a PDI plate 50 that is disposed in the vicinity within the focal depth of the intermediate imaging surface and that selectively transmits the diffraction light diffracted by the diffraction grating 40, a detector 30 that detects an image of the specimen, and a detector 60 that detects an interference image of the measurement light.SELECTED DRAWING: Figure 2 【課題】波面収差をその場で高精度に計測することができる検査装置及び波面収差計測方法を提供する。【解決手段】実施形態に係る検査装置１は、検査時に試料１１が配置され、収差計測時に点光源が配置されるステージ１０と、検査時に照明光Ｌ０が試料１１で反射した検査光Ｌ１及び収差計測時に点光源からの計測光Ｌ２を透過させる対物レンズ２０と、検査光Ｌ１及び計測光Ｌ２を透過させる瞳リレーレンズ２１であって、対物レンズ２０の焦点距離よりも長い焦点距離を有する瞳リレーレンズ２１と、瞳リレーレンズ２１との間に中間結像面が形成される瞳リレーレンズ２２と、瞳リレーレンズ２１と中間結像面との間に配置され、計測光Ｌ２を回折させる回折格子４０と、中間結像面の焦点深度内の近傍に配置され、回折格子４０により回折された回折光を選択透過させるＰＤＩ板５０と、試料の像を検出する検出器３０と、計測光の干渉像を検出する検出器６０とを備える。【選択図】図２