CHEMICAL SUPPLY SYSTEM AND CHEMICAL SUPPLY METHOD

To provide a chemical supply system that can utilize a filer in a sound condition.SOLUTION: A chemical supply system according to an embodiment comprises: a tank in which chemicals are stored; first piping, connected to the tank, through which chemicals are fed; a first filter unit connected to the...

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Bibliographic Details
Main Authors MURANAKA TOSHIYUKI, KURODA YUICHI
Format Patent
LanguageEnglish
Japanese
Published 26.08.2022
Subjects
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Summary:To provide a chemical supply system that can utilize a filer in a sound condition.SOLUTION: A chemical supply system according to an embodiment comprises: a tank in which chemicals are stored; first piping, connected to the tank, through which chemicals are fed; a first filter unit connected to the first piping and having a first filter that filters the chemicals; second piping, connected to the first filter unit, through which the chemicals filtered by the first filter are fed; and a submerged foreign matter detection device connected to the first piping.SELECTED DRAWING: Figure 1 【課題】健全な状態でフィルタを利用可能な薬液供給システムを提供する。【解決手段】実施形態の薬液供給システムは、薬液を貯留するタンクと、タンクに接続され、薬液を送液する第１配管と、第１配管に接続され、薬液が濾過される第１フィルタを有する第１フィルタユニットと、第１フィルタユニットに接続され、第１フィルタによって濾過された薬液を送液する第２配管と、第１配管に接続された液中異物検知装置と、を備える薬液供給システムである。【選択図】図１
Bibliography:Application Number: JP20210022689