IMAGING SYSTEM, INSPECTION DEVICE AND IMAGING METHOD

• Main Authors: SHINODA MASAFUMI, GONDAIRA AKIRA
• Format: Patent
• Language: English; Japanese
• Published: 15.08.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide an imaging system, inspection device and imaging method.SOLUTION: An imaging system according to an embodiment comprises: a light source 11 which generates illumination light that illuminates a sample S; a first line sensor 31 which has a plurality of light reception pixels arrayed in a line so as to detect reflection light from the sample S in a first exposure time and detects the reflection light in a first wavelength band; a second line sensor 32 which has a plurality of light reception pixels arrayed in a line so as to detect reflection light from the sample S in a second exposure time and detects the reflection light in a second wavelength band; a scan mechanism which relatively moves the detection positions of the first and second line sensors with respect to the sample S; and a processing unit 50 which generates an image of the sample S according to the detection result of the first line sensor 31 and the detection result of the second line sensor 32 when scan is performed by the scan mechanism.SELECTED DRAWING: Figure 1 【課題】撮像システム、検査装置、及び撮像方法を提供する。【解決手段】本実施形態にかかる撮像システムは、試料Ｓを照明する照明光を発生する光源１１と、試料Ｓからの反射光を第１の露光時間で検出するようにライン状に配列された複数の受光画素を備え、第１の波長帯域の反射光を検出する第１ラインセンサ３１と、試料Ｓからの反射光を第２の露光時間で検出するようにライン状に配列された複数の受光画素を備え、第２の波長帯域の反射光を検出する第２ラインセンサ３２と、試料Ｓに対する第１及び第２ラインセンサの検出位置を相対的に移動させる走査機構と、走査機構で走査したときの第１ラインセンサ３１の検出結果と第２ラインセンサ３２の検出結果に応じて、試料Ｓの画像を生成する処理部５０と、を備えている。【選択図】図１