LIGHT EMITTING ELEMENT, LIGHT DETECTION MODULE, METHOD FOR MANUFACTURING LIGHT EMITTING ELEMENT, AND SCANNING ELECTRON MICROSCOPE

• Main Authors: YAMAUCHI KUNIYOSHI, NAKAMURA TAKAYUKI, MAEDA JUNYA, OGAWARA SATORU, KONDO MINORU
• Format: Patent
• Language: English; Japanese
• Published: 09.08.2022
• Subjects: ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMISTRY; DYES; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; MEASURING; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; PHYSICS; POLISHES; TESTING

To provide a light emitting element capable of reducing cross talk and expanding applications; a light detection module; a method for manufacturing the light emitting element; and a scanning electron microscope using the light emitting element.SOLUTION: A light emitting element 1 includes a fiber optic plate substrate 2 having transparency to fluorescence and a light emitting layer 3 composed of a nitride semiconductor layer having a quantum well structure. In the light emitting element 1, the fiber optic plate substrate 2 is directly bonded to the light emitting layer 3.SELECTED DRAWING: Figure 1 【課題】クロストークを低減でき、且つ用途を広げることが可能な発光素子、光検出モジュール、発光素子の製造方法、及びこれを用いた走査型電子顕微鏡を提供する。【解決手段】発光素子１は、蛍光に対する透明性を有するファイバオプティクプレート基板２と、量子井戸構造を有する窒化物半導体層からなる発光層３と、を備えている。この発光素子１では、ファイバオプティクプレート基板２と発光層３とが直接接合されている。【選択図】図１