FASTENING STRUCTURE, PLASMA PROCESSING DEVICE AND FASTENING METHOD

• Main Authors: ENDO KENICHI, AMANO KENJI, SUEKI HIDETO, OMORI TAKASHI, NAKAGAWA TAICHI
• Format: Patent
• Language: English; Japanese
• Published: 08.08.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To suppress deformation of a fastening screw due to a difference in thermal expansion between members constituting a substrate processing device in fastening structure in which the members are fastened together by the fastening screw.SOLUTION: Fastening structure fastening a first member and a second member both constituting a substrate processing device with a fastening screw is provided, the first member includes a female threaded portion, the fastening screw includes: a screw shaft portion formed with a male threaded portion threadedly engaged with the female threaded portion; and a screw head, the second member includes: a through-hole through which the screw shaft portion penetrates, and a first washer and a second washer arranged in an overlapping manner between the screw head and the second member, and through which the screw shaft portion penetrates, the through hole has an oval cross section, the first washer is arranged on the side of the screw head, and has a hole through which the screw shaft portion penetrates, and the second washer is arranged on the side of the second member, and includes an oblong hole through which the screw shaft penetrates, and a projecting portion inserted into the through hole.SELECTED DRAWING: Figure 6 【課題】基板処理装置を構成する部材同士を締結ネジにより締結する締結構造において、部材間の熱膨張差により締結ネジが変形することを抑制する。【解決手段】基板処理装置を構成する第１の部材と第２の部材とを締結ネジにより締結する締結構造であって、前記第１の部材は、雌ネジ部を有し、前記締結ネジは、前記雌ネジ部に螺合する雄ネジ部が形成されたネジ軸部と、ネジ頭部とを有し、前記第２の部材は、前記ネジ軸部が貫通する貫通孔を有し、前記ネジ頭部と前記第２の部材との間において重ねて配置され、前記ネジ軸部が貫通する第１の座金及び第２の座金とを備え、前記貫通孔は断面が長丸形状であり、前記第１の座金は前記ネジ頭部の側に配置されるとともに、前記ネジ軸部が貫通する穴を有し、前記第２の座金は前記第２の部材の側に配置されるとともに、前記ネジ軸部が貫通する長丸形状の穴と、前記貫通孔に挿入される突出部とを有する。【選択図】図６