FLAT HEAD UNITS FOR HEAVY LOAD ALIGNMENT

• Main Authors: IGUCHI ISAMI, HASSAN YOUSEFI, ROBIN L TINER, ZHOU JIANHUA, GANESH BABU CHANDRASEKARAN
• Format: Patent
• Language: English; Japanese
• Published: 02.08.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

To provide electronic device fabrication, and more specifically, flat head units for heavy load alignment.SOLUTION: A mask frame support unit includes a case, a protruding body extending below the case, and a station having a flat head disposed above the case. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case, and includes a second end having a second diameter opposite the first end. The second diameter is less than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. The case houses a number of components including an upper receiving plate in contact with the station, a lower receiving plate disposed underneath the upper receiving plate, a flat head unit movement support mechanism disposed between the lower receiving plate and the body, and a centering component.SELECTED DRAWING: Figure 1 【課題】電子デバイスの製造に関するものである。より具体的には、重荷重アライメント用フラットヘッドユニットに関する。【解決手段】マスクフレーム支持ユニットは、ケースと、ケースの下方に延びる突出体と、ケースの上方に配置されたフラットヘッドを有するステーションとを含む。突出体は、テーパ領域と円筒領域とを含む。テーパ領域は、ケースに結合された第１の直径を有する第１の端部を含み、第１の端部の反対側の第２の直径を有する第２の端部を含む。第２の直径は第１の直径より小さく、テーパ領域は、第２の端部において円筒領域に結合される。ケースは、ステーションに接触する上部受け板と、上部受け板の下に配置された下部受け板と、下部受け板と本体との間に配置されたフラットヘッドユニット移動支持機構と、センタリング部品とを含む幾つかの構成要素を収納する。【選択図】図１