OPTICAL DEVICE

To provide an optical device which can remove measurement noise due to a lower layer other than a measurement object.SOLUTION: An optical device 100 comprises: a light source 101; an illumination side pinhole 102 which is arranged on an optical path of the light source 101 and a sample; a lens 110 w...

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Bibliographic Details
Main Authors HIDAKA YASUHIRO, NUMATA MITSUNORI
Format Patent
LanguageEnglish
Japanese
Published 20.07.2022
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
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Summary:To provide an optical device which can remove measurement noise due to a lower layer other than a measurement object.SOLUTION: An optical device 100 comprises: a light source 101; an illumination side pinhole 102 which is arranged on an optical path of the light source 101 and a sample; a lens 110 which narrows down measurement light in the order from the sample side toward an imaging plane; an imaging side pinhole 111; a lens 112 which forms parallel light; and an image sensor 113. The illumination side pinhole 102 and the imaging side pinhole 111 are arranged such that the pinhole centers respectively match the optical axis, and the imaging side pinhole 111 removes reflection light equal to or less than two layers from the surface of the sample.SELECTED DRAWING: Figure 1 【課題】計測対象以外の下層による測定ノイズを除去できる光学装置を提供すること。【解決手段】光学装置１００は、光源１０１と、光源１０１と試料の光路上に配置された照明側ピンホール１０２と、試料側から結像面に向かって順に、測定光を絞るレンズ１１０と、結像側ピンホール１１１と、平行光とするレンズ１１２と、画像センサ１１３とを備え、照明側ピンホール１０２と結像側ピンホール１１１は互いにピンホール中心が光軸に一致するように配置されており、結像側ピンホール１１１は、試料の表面から２層以下の反射光を除去するようにした。【選択図】図１
Bibliography:Application Number: JP20210001199