SAMPLE CROSS-SECTION PREPARATION METHOD AND FORMWORK KIT FOR SAMPLE CROSS-SECTION PREPARATION

• Main Authors: TODOROKI HIROKI, MORI SHINOBU, NEGISHI TSUTOMU, HASEBE YUJI, KATAOKA SHOGO, SATO TSUKASA
• Format: Patent
• Language: English; Japanese
• Published: 08.07.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To prepare easily cross sections of multiple particles (fine particles).SOLUTION: A notch is formed at the edge of a substrate (S10). A fluid containing a plurality of particles is poured into the pouring space formed by surrounding the notch with an auxiliary member (S14). Hardening of the fluid results in an embedding body (S16). The substrate containing the embedding body is set in the sample cross-section preparation device (S20), and the edge of the substrate is milled by an ion beam (S22). In this way, a cross section of the embedded body is created. The cross section includes a plurality of particle cross sections.SELECTED DRAWING: Figure 1 【課題】複数の粒子（微粒子）の断面を簡便に作製する。【解決手段】基板の端部に切欠きが形成される（Ｓ１０）。切欠きを補助部材で囲んで形成される流し込み空間に複数の粒子を含む流動体が流し込まれる（Ｓ１４）。流動体の硬化により包埋体が生じる（Ｓ１６）。包埋体を含む試料板が試料断面作製装置にセットされ（Ｓ２０）、試料板の端部がイオンビームにより切削される（Ｓ２２）。これにより包埋体の断面が作製される。その断面には複数の粒子断面が含まれる。【選択図】図１