MAGNETIC SENSOR
To improve sensitivity of a magnetic sensor that makes use of the magnetic impedance effect.SOLUTION: A magnetic sensor 1 is provided, comprising: a nonmagnetic substrate; and a magnetic sensitive element having a soft magnetic material layer 101 with a long axis and short axis provided on the subst...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
07.07.2022
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Subjects | |
Online Access | Get full text |
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Summary: | To improve sensitivity of a magnetic sensor that makes use of the magnetic impedance effect.SOLUTION: A magnetic sensor 1 is provided, comprising: a nonmagnetic substrate; and a magnetic sensitive element having a soft magnetic material layer 101 with a long axis and short axis provided on the substrate, where the soft magnetic material layer has uniaxial magnetic anisotropy in a direction crossing the long axis, is configured to sense a magnetic field by means of the magnetic impedance effect, and is mode of an amorphous alloy having an initial magnetic permeability of 5000 or greater.SELECTED DRAWING: Figure 1
【課題】磁気インピーダンス効果を用いた磁気センサの感度を向上させることを目的とする。【解決手段】磁気センサ1は、非磁性の基板と、基板上に設けられ、長手方向と短手方向とを有し、長手方向と交差する方向に一軸磁気異方性を有し、磁気インピーダンス効果により磁界を感受する、初透磁率が5000以上であるアモルファス合金の軟磁性体層101を含む感受素子とを備える。【選択図】図1 |
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Bibliography: | Application Number: JP20200217868 |