SUSCEPTOR, METHOD FOR GROWING SILICON CARBIDE EPITAXIAL LAYER, AND METHOD FOR MANUFACTURING SILICON CARBIDE EPITAXIAL SUBSTRATE

• Main Author: ENOKIZONO TARO
• Format: Patent
• Language: English; Japanese
• Published: 07.07.2022
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CRYSTAL GROWTH; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

To provide a susceptor that can extend the life.SOLUTION: A susceptor provided with a recess for arranging a substrate has a main surface, an inner peripheral surface, and a bottom surface. The inner peripheral surface is continuous with the main surface. The bottom surface is continuous with the inner peripheral surface. The recess is composed of the inner peripheral surface and the bottom surface. The inner peripheral surface includes a first side surface extending perpendicular to the bottom surface and a second side surface connected to each of the first side surface and the main surface. In a cross section perpendicular to the main surface, the second side surface is curved or linear. When the second side surface is curved, the second side surface is convex outward. When the second side surface is linear, the second side surface is inclined with respect to each of the main surface and the first side surface portion.SELECTED DRAWING: Figure 2 【課題】寿命を長くすることができるサセプタを提供する。【解決手段】基板を配置するための凹部が設けられたサセプタは、主面と、内周面と、底面とを有している。内周面は、主面に連なっている。底面は、内周面に連なっている。凹部は、内周面と底面とによって構成されている。内周面は、底面に対して垂直に延びる第１側面部と、第１側面部および主面の各々に連なる第２側面部とを含んでいる。主面に対して垂直な断面において、第２側面部は、湾曲状または直線状である。第２側面部が湾曲状の場合、第２側面部は、外側に凸である。第２側面部が直線状の場合、第２側面部は、主面および第１側面部の各々に対して傾斜している。【選択図】図２