WORKPIECE PROCESSING DEVICE

• Main Authors: YAMANOBE HOKUTO, TAJIMA KAZUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 06.07.2022
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

To provide a workpiece processing device which can prevent a process liquid supplied from a nozzle from entering an opening provided at a base plate by providing a first drip-proof mechanism and a second drip-proof mechanism.SOLUTION: A workpiece processing device of the invention includes: a base plate 65 which partitions a space for processing a workpiece at the lower side; a processing module 70A which processes the workpiece; process liquid supply nozzles 83, 84 which supply a process liquid to the workpiece; a module driving device 71A; and a first drip-proof mechanism 91 and a second drip-proof mechanism 94. The base plate 65 has an opening 66 so that the processing module 70A can move in a horizontal direction. The first drip-proof mechanism 91 and the second drip-proof mechanism 94 prevent the process liquid supplied from the process liquid supply nozzles 83, 84 from entering through the opening 66.SELECTED DRAWING: Figure 6 【課題】第１の防滴機構および第２の防滴機構を設けることによって、ノズルから供給された処理液がベースプレートに設けられた開口部に入るのを防ぐことができるワークピース処理装置を提供する。【解決手段】本発明のワークピース処理装置は、ワークピースを処理する空間を下方で仕切るベースプレート６５と、ワークピースを処理する処理モジュール７０Ａと、ワークピースに処理液を供給する処理液供給ノズル８３，８４と、モジュール駆動装置７１Ａと、第１の防滴機構９１および第２の防滴機構９４を備える。ベースプレート６５は、処理モジュール７０Ａが水平方向に移動可能となるように開口部６６を有し、第１の防滴機構９１および第２の防滴機構９４によって、処理液供給ノズル８３，８４から供給された処理液が開口部６６から入り込むのを防止するように構成されている。【選択図】図６