FLAME SPRAY MATERIAL, FLAME SPRAY COATING, FORMATION METHOD OF FLAME SPRAY COATING, AND COMPONENT OF PLASMA ETCHING APPARATUS

• Main Authors: MASUDA TAKAYA, TAGUCHI KENSUKE, MINAZU TATSUO, MIZUNO HIROAKI, SHIOJIRI YASUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 22.06.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To provide a flame spray coating with an excellent plasma erosion resistance, capable of protecting a component of a plasma etching apparatus from a plasma erosion for a long period of time and contributing to a stable production of a device and a long life of the component.SOLUTION: A flame spray material according to an aspect of the invention comprises a composite compound including 40 mol% or more and 80 mol% or less of a rare-earth fluoride, 10 mol% or more and 40 mol% or less of magnesium fluoride, and 0 mol% or more and 40 mol% or less of calcium fluoride.SELECTED DRAWING: None 【課題】耐プラズマエロージョン性に優れ、長期にわたりプラズマエッチング装置の部材をプラズマエロージョンから保護し、デバイスの安定生産や部材の長寿命化に寄与することのできる溶射皮膜を提供する。【解決手段】本発明の一態様である溶射材は、希土類フッ化物を４０ｍｏｌ％以上８０ｍｏｌ％以下の割合で含み、フッ化マグネシウムを１０ｍｏｌ％以上４０ｍｏｌ％以下の割合で含み、フッ化カルシウムを０ｍｏｌ％以上４０ｍｏｌ％以下の割合で含む複合化物からなる。【選択図】なし