DIAPHRAGM VACUUM GAUGE

• Main Authors: SOEDA SUSUMU, NIIMURA YUSUKE, SEKINE MASASHI, ISHIHARA TAKUYA
• Format: Patent
• Language: English; Japanese
• Published: 08.06.2022
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

To provide a diaphragm vacuum gauge with an extended lower limit of a pressure measurement range.SOLUTION: A diaphragm vacuum gauge provided herein comprises: a pressure adjustment chamber 1 provided to be in communication with a measured chamber via a pipe 2; a pressure measurement chamber 3 provided to be in communication with the pressure adjustment chamber 1; a pressure receiving unit 5 having capacitance that changes with displacement of a diagram by pressure of a measured medium in the pressure measurement chamber 3; a temperature sensor 8 configured to measure temperature of the measured medium in the pressure measurement chamber 3; and a circuitry unit 10 configured to convert the capacitance into a measured pressure value and correct the measured pressure value according to the temperature measured by the temperature sensor 8 and temperature of the measured medium in the measured chamber.SELECTED DRAWING: Figure 5 【課題】圧力計測範囲の下限を拡張する。【解決手段】隔膜真空計は、被計測チャンバと配管２を介して連通するように設けられた圧力調整室１と、圧力調整室１と連通するように設けられた圧力計測室３と、圧力計測室３内の被計測媒体の圧力によるダイアフラムの変位に応じて静電容量が変化する受圧部５と、圧力計測室３内の被計測媒体の温度を計測する温度センサ８と、静電容量を圧力計測値に変換し、温度センサ８によって計測された温度と被計測チャンバ内の被計測媒体の温度とに基づいて圧力計測値を補正する回路部１０とを備える。【選択図】 図５