PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT

• Main Authors: TANAKA MASAAKI, KOBAYASHI TASUKE, SHIROMORI TOMOYA, SAKAI MINEICHI, ABE RYUICHIRO, KOYAMA YUJI, HIGUCHI TAKAFUMI, MAWATARI KAZUAKI, HAYAKAWA YUTAKA
• Format: Patent
• Language: English; Japanese
• Published: 18.05.2022
• Subjects: ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

To properly form slits.SOLUTION: Multiple vibration regions 22 are separated from each other by a slit 41 between the vibration regions. The slit 41 is formed in a state of forming a tapered portion 42 whose width narrows from the one side 22a on the side opposite to the support 10 side in the vibra...