PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT

• Main Authors: TANAKA MASAAKI, KOBAYASHI TASUKE, SHIROMORI TOMOYA, SAKAI MINEICHI, ABE RYUICHIRO, KOYAMA YUJI, HIGUCHI TAKAFUMI, MAWATARI KAZUAKI, HAYAKAWA YUTAKA
• Format: Patent
• Language: English; Japanese
• Published: 18.05.2022
• Subjects: ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

To properly form slits.SOLUTION: Multiple vibration regions 22 are separated from each other by a slit 41 between the vibration regions. The slit 41 is formed in a state of forming a tapered portion 42 whose width narrows from the one side 22a on the side opposite to the support 10 side in the vibration region 22 toward the other side 22b on the opposite side to the one side 22a. An electrode film 60 is placed inside the slit 41 in the normal direction with respect to one surface 22a, and the angle θ1 formed by the side surface 22c that forms the tapered portion 42 in the vibration region 22 and the surfaces 22b and Sv parallel to the one surface 22a is set to 39 to 81°.SELECTED DRAWING: Figure 1 【課題】スリットが適切に形成されるようにする。【解決手段】複数の振動領域２２は、互いの振動領域の間がスリット４１で分離され、スリット４１は、振動領域２２における支持体１０側と反対側の一面２２ａ側から当該一面２２ａと反対側の他面２２ｂ側に向かって幅が狭くなるテーパ部４２が構成される状態で形成されるようにする。電極膜６０は、一面２２ａに対する法線方向において、スリット４１よりも内側に配置されるようにし、振動領域２２におけるテーパ部４２を構成する側面２２ｃと、一面２２ａと平行な面２２ｂ、Ｓｖとの成す角度θ１が３９～８１°となるようにする。【選択図】図１