TRANSPORT APPARATUS, VACUUM APPARATUS, PROCESSING SYSTEM, AND ARTICLE MANUFACTURING METHOD

To provide a transport apparatus, a vacuum apparatus, a processing system, and an article manufacturing method, capable of stably transporting a mover in a non-contact state with a stator.SOLUTION: A transport apparatus includes: a stator including a coil group composed of a plurality of coils arran...

Full description

Saved in:
Bibliographic Details
Main Authors EZAWA MITSUHARU, MIZUNO TOMOHIRO
Format Patent
LanguageEnglish
Japanese
Published 17.05.2022
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
CONVEYING
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
GENERATION
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:To provide a transport apparatus, a vacuum apparatus, a processing system, and an article manufacturing method, capable of stably transporting a mover in a non-contact state with a stator.SOLUTION: A transport apparatus includes: a stator including a coil group composed of a plurality of coils arranged along a first direction and a first magnet group composed of a plurality of first magnets arranged along the first direction and magnetized in one direction; and a mover including a second magnet group composed of a plurality of second magnets arranged to be able to face the plurality of coils and a third magnet group composed of a plurality of third magnets arranged to be able to face the first magnet group and magnetized in a direction opposite to the first magnet group. The stator has a first portion in which the coil group and the first magnet group are arranged to face each other, and a second portion in which the first magnet group is not arranged. A repulsion compensation unit is provided in the second portion to compensate for the repulsion between the first and third magnet groups.SELECTED DRAWING: Figure 1 【課題】可動子を固定子と非接触の状態で安定して搬送することができる搬送装置、真空装置、加工システム及び物品の製造方法を提供する。【解決手段】搬送装置は、第１の方向に沿って配置された複数のコイルからなるコイル群と、第１の方向に沿って配置され一方向に着磁された複数の第１の磁石からなる第１の磁石群とを有する固定子と、複数のコイルに対向可能に配置された複数の第２の磁石からなる第２の磁石群と、前記第１の磁石群と対向可能に配置され、第１の磁石群と反発する方向に着磁された複数の第３の磁石からなる第３の磁石群とを有する可動子と、を有し、固定子は、コイル群と第１の磁石群とが対向するように配置された第１の部分と、第１の磁石群が配置されていない第２の部分と、を有し、第２の部分において、第１の磁石群と第３の磁石群との間に生じる反発力を補う反発力補償ユニットが設けられている。【選択図】図１
Bibliography:Application Number: JP20200181878