LIGHT SOURCE DEVICE AND INSPECTION DEVICE

To provide a light source device, etc. that can restrain a deterioration in quality of an object to be inspected, and have high versatility.SOLUTION: A light source device 1 is used for inspection. The light source device 1 comprises a light source 20 for emitting first light L1, and an optical memb...

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Bibliographic Details
Main Authors ABE TAKASHI, HAYASHI SHINTARO, MOTEGI SHOGO
Format Patent
LanguageEnglish
Japanese
Published 12.05.2022
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Summary:To provide a light source device, etc. that can restrain a deterioration in quality of an object to be inspected, and have high versatility.SOLUTION: A light source device 1 is used for inspection. The light source device 1 comprises a light source 20 for emitting first light L1, and an optical member 30 including a plurality of wavelength conversion bodies for absorbing a portion of the first light L1, and emitting second light L2 having a wavelength different from that of the first light L1. The optical member 30 comprises an incidence surface 30a on which the first light L1 is incident, and an emission surface 30b for emitting emission light L including another portion of the first light L1 incident from the incidence surface 30a and the second light L2. The emission light L has intensity equal to or higher than 5% of peak intensity over a wavelength band of 450 nm or more and 800 nm or less. The emission surface 30b is a light emission surface for the second light L2.SELECTED DRAWING: Figure 1 【課題】検査対象物の品質の劣化を抑制することができ、汎用性が高い光源装置などを提供する。【解決手段】光源装置1は、検査に用いられる光源装置である。光源装置1は、第1の光L1を発する光源20と、第1の光L1の一部を吸収し、第1の光L1とは波長が異なる第2の光L2を発する複数の波長変換体を含む光学部材30と、を備える。光学部材30は、第1の光L1が入射する入射面30aと、入射面30aから入射した第1の光L1の他の一部と第2の光L2とを含む出射光Lを出射する出射面30bと、を有する。出射光Lは、450nm以上800nm未満の波長帯域に亘ってピーク強度の5%以上の強度を有する。出射面30bは、第2の光L2の発光面である。【選択図】図1
Bibliography:Application Number: JP20200179072