STRAIN CORRECTION PROCESSOR, DRAWING METHOD, AND PROGRAM
To provide a strain correction processor which can shorten a standby time until drawing starts after strain correction of image data, after a substrate is carried in.SOLUTION: A strain correction processor performs strain correction on the basis of a strain amount of a drawing object with respect to...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
11.05.2022
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Subjects | |
Online Access | Get full text |
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Summary: | To provide a strain correction processor which can shorten a standby time until drawing starts after strain correction of image data, after a substrate is carried in.SOLUTION: A strain correction processor performs strain correction on the basis of a strain amount of a drawing object with respect to original image data that defines a pattern to be formed in a drawing area, generates corrected image data, and hands the same over to a drawing processing part. At this time, the processor hands corrected partial image data for drawing over to the drawing processing part at each time when performing strain correction for original image data with respect to a partial area of the drawing area.SELECTED DRAWING: Figure 1
【課題】基板を搬入してから、画像データの歪補正を行った後、描画を開始するまでの待機時間を短縮することが可能な歪補正処理装置を提供する。【解決手段】歪補正処理装置が、描画領域に形成するパターンを定義する原画像データに対して、描画対象物の歪量に基づいて歪補正を行い、補正済の画像データを生成して描画処理部に引き渡す 。このとき、描画領域の一部の領域について原画像データに対して歪補正を行うごとに、補正済の描画用部分画像データを描画処理部に引き渡す。【選択図】図1 |
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Bibliography: | Application Number: JP20200178123 |