METHOD FOR MANUFACTURING FILM BULK ACOUSTIC RESONANCE DEVICE HAVING SPECIFIC RESONANCE FREQUENCY

• Main Authors: YEN TSUNG FU, CHANG KUANG-JUI, TSAI CHUN HSIEN, TSAI CHUN JUNG, LEE TING CHUAN
• Format: Patent
• Language: English; Japanese
• Published: 10.05.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To present a method for manufacturing a FBAR device that can simultaneously detect various volatile organic compound gases to improve efficiency, simplify a configuration, and reduce manufacturing cost.SOLUTION: A method for manufacturing a film bulk acoustic resonance device having a specific resonance frequency includes the steps of: providing an upper electrode; providing a lower electrode; arranging a first piezoelectric material layer between the upper electrode and the lower electrode; and arranging a resonance frequency determining metal layer on the upper electrode, wherein the resonance frequency determining metal layer has a thickness and forms a curve relationship between the thickness and the resonance frequency of the film bulk acoustic resonance device, and when the thickness changes linearly, the resonance frequency changes non-linearly.SELECTED DRAWING: Figure 1 【課題】効率を向上させ、構造を単純化し、製造コストを削減するために、さまざまな揮発性有機化合物ガスを同時に検出できるＦＢＡＲ装置を製造する方法を提出する。【解決手段】特定共振周波数を有する薄膜バルク音響共振装置を製造する方法であって、上部電極を提供する工程と、下部電極を提供する工程と、前記上部電極と前記下部電極との間に第一圧電材料層を配置する工程と、前記上部電極に共振周波数決定金属層を配置する工程であって、前記共振周波数決定金属層は、厚さを有し、前記薄膜バルク音響共振装置の共振周波数と前記厚さとの間に曲線関係を形成し、前記厚さが線形に変化すると、前記共振周波数が非線形に変化する。【選択図】図１