DIELECTRIC BARRIER DISCHARGE ELECTRODE AND DIELECTRIC BARRIER DISCHARGE DEVICE

• Main Authors: OKA SHOTARO, TAKAMATSU TOMONAO, SATO YOSUKE, UI AKIO, YASUI SUKEYUKI, AKITA MASATO, MATSUDA SHINYA
• Format: Patent
• Language: English; Japanese
• Published: 29.03.2022
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

To provide a dielectric barrier discharge device that enables low voltage drive and suppresses degradation and decomposition of dielectric and metal electrodes.SOLUTION: A dielectric barrier discharge device 1 includes a dielectric 4, a first electrode 5 provided to be exposed on the dielectric 4, a second electrode 6 provided to be covered by the dielectric 4, and a third electrode 7 provided to be covered by the dielectric near the first electrode 5.SELECTED DRAWING: Figure 1 【課題】低電圧での駆動を実現した上で誘電体や金属電極の劣化や分解を抑制することを可能にした誘電体バリア放電装置を提供する。【解決手段】実施形態の誘電体バリア放電装置１は、誘電体４と、誘電体４上に露出するように設けられた第１電極５と、誘電体４に覆われるように設けられた第２電極６と、第１電極５の近傍に誘電体に覆われるように設けられた第３電極７とを具備する。【選択図】図１