SUBSTRATE INVERSION DEVICE AND SUBSTRATE INVERSION METHOD

• Main Authors: IMAFUKU SHIGEKI, MATSUOKA SATOSHI, SUZUKI HIROYUKI, NAGAE KAZUO, NAGASAWA YOSUKE
• Format: Patent
• Language: English; Japanese
• Published: 11.03.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

To provide a substrate inversion device and a substrate inversion method with improved reliability.SOLUTION: A substrate inversion device (1) for inverting a substrate (10) includes a pair of belts (12), a pair of clampers (14), a rotation drive part (22) that rotates the pair of clampers (14) and the pair of belts (12) together, and a control unit (8). The control unit (8) rotates the pair of clampers (14) and the pair of belts (12) by the rotation drive part (22) in a state of holding the substrate (10) at a non-contact position with the pair of belts (12) by the pair of clampers (14) to invert the substrate (10).SELECTED DRAWING: Figure 4 【課題】信頼性を向上させた基板反転装置および基板反転方法を提供すること。【解決手段】基板（１０）を反転させる基板反転装置（１）は、一対のベルト（１２）と、一対のクランパー（１４）と、一対のクランパー（１４）および一対のベルト（１２）を共に回転させる回転駆動部（２２）と、制御部（８）と、を備え、制御部（８）は、一対のクランパー（１４）によって基板（１０）を一対のベルト（１２）に非接触な位置に保持した状態で、回転駆動部（２２）によって一対のクランパー（１４）および一対のベルト（１２）を回転させて、基板（１０）を反転させる。【選択図】図４