DIFFRACTION GRADING

To provide a diffractive grating for use in the soft s-ray region with improved diffraction efficiency.SOLUTION: A diffraction grating (1) is provided, comprising: a diffraction grating substrate (11) having a periodic concavo-convex structure formed on a surface thereof; a basic reflection layer (1...

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Bibliographic Details
Main Authors HATANO TADASHI, KOIKE MASAHITO
Format Patent
LanguageEnglish
Japanese
Published 10.02.2022
Subjects
COLORIMETRY
GAMMA RAY OR X-RAY MICROSCOPES
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
IRRADIATION DEVICES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
RADIATION PYROMETRY
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
TESTING
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Summary:To provide a diffractive grating for use in the soft s-ray region with improved diffraction efficiency.SOLUTION: A diffraction grating (1) is provided, comprising: a diffraction grating substrate (11) having a periodic concavo-convex structure formed on a surface thereof; a basic reflection layer (12) composed of Au, Ni, C, and B4C; and an enhanced reflective layer (13) made of a compound containing either one of, or at least one of, W, Ir, Re and Os.SELECTED DRAWING: Figure 1 【課題】軟Ｘ線領域において利用される回折格子の回折効率を従来よりも改善すること。【解決手段】回折格子（１）は、表面に周期的な凹凸構造が形成された回折格子基板（１１）と、Ａｕ、Ｎｉ、Ｃ、及びＢ４Ｃのいずれかからなる基本反射層（１２）と、Ｗ、Ｉｒ、Ｒｅ、及びＯｓのいずれか又はＷ、Ｉｒ、Ｒｅ、及びＯｓの少なくとも１つを含む化合物からなる増反射層（１３）と、を備えている。【選択図】図１
Bibliography:Application Number: JP20200131031