POLISHING SHEET

• Main Authors: YAMASHITA MIU, SUGURO KYOICHI, AIKAWA FUMITO, SATO MAKOTO
• Format: Patent
• Language: English; Japanese
• Published: 08.02.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GRINDING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TOOLS FOR GRINDING, BUFFING, OR SHARPENING; TRANSPORTING

To provide a polishing sheet which can increase a polishing rate, and can reduce average surface roughness of a polishing object even when the polishing rate is increased.SOLUTION: A polishing sheet has a polishing layer containing diamond particles and a binder resin formed on a flexible base material, in which an uneven part is formed on the surface of the polishing layer, maximum surface roughness (Rmax) on the surface of the polishing layer is larger than a median diameter of the primary particles of the diamond particles, and an average distance between the projections on the surface of the polishing layer is larger than the median diameter of the primary particles of the diamond particles. The polishing sheet can be suitably used for finishing processing of a magnetic disk, a precision apparatus, a precision component, and a printed circuit board.SELECTED DRAWING: Figure 1 【課題】研磨レートを高くすることができ、研磨レートを高くしても研磨対象物の平均表面粗さを小さくさせることができる研磨シートの提供。【解決手段】可撓性基材上にダイヤモンド粒子とバインダー樹脂とを含む研磨層が形成されてなる研磨シートであって、研磨層の表面に凹凸部が形成されてなり、研磨層表面の最大表面粗さ（Ｒｍａｘ）が、ダイヤモンド粒子の一次粒子のメディアン径よりも大きく、かつ研磨層表面の凸部間の平均距離が、ダイヤモンド粒子の一次粒子のメディアン径よりも大きいことを特徴とする研磨シート。研磨シートは、磁気ディスク、精密機器、精密部品及びプリント基板の仕上げ加工等に好適に用いることができる。【選択図】図１