TARGET SUPPLY DEVICE, EXTREME-ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

To provide a target supply device used for an EUV light generation device of an LPP system.SOLUTION: A target supply device 40 comprising a first enclosure member 410 and a second enclosure member 42. Further, the target supply device further comprises: a ring-shaped sealing part which is integrally...

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Bibliographic Details
Main Authors SHIRAISHI YUTAKA, NISHISAKA TOSHIHIRO, HORI TSUKASA
Format Patent
LanguageEnglish
Japanese
Published 25.01.2022
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
X-RAY TECHNIQUE
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Summary:To provide a target supply device used for an EUV light generation device of an LPP system.SOLUTION: A target supply device 40 comprising a first enclosure member 410 and a second enclosure member 42. Further, the target supply device further comprises: a ring-shaped sealing part which is integrally formed on one of the first enclosure member and the second enclosure member, and extends from one enclosure member to the other enclosure member, surrounds a communication part between the first enclosure member and the second enclosure member over the whole periphery, and is firmly attached to the other enclosure member; and a fastening member 600 which fastens the first enclosure member and the second enclosure member with each other such that the first enclosure member communicates with the second enclosure member via the communication part, and pressurizes the sealing part to the other enclosure member by fastening. The sealing part is plastically deformed by pressurization by the fastening member to the other enclosure member, and seals a space between the first enclosure member and the second enclosure member around the communication part by plastic deformation.SELECTED DRAWING: Figure 4 【課題】ＬＰＰ方式のＥＵＶ光生成装置に用いるターゲット供給装置を提供する。【解決手段】ターゲット供給装置４０は、第１内包部材４１０と、第２内包部材４２とを備える。また、ターゲット供給装置は、第１内包部材及び第２内包部材の一方に一体に形成されており、一方の内包部材から他方の内包部材に向かって延在し、第１内包部材及び第２内包部材の間の連通部を全周に渡って囲い、他方の内包部材に密着するリング状の封止部と、第１内包部材が連通部を介して第２内包部材と連通するように第１内包部材及び第２内包部材を互いに締結し、締結によって他方の内包部材に封止部を押圧する締結部材６００とをさらに備える。封止部は、締結部材による他方の内包部材への押圧によって塑性変形し、塑性変形によって連通部の周囲における第１内包部材及び第２内包部材の間の空間を封止する。【選択図】図４
Bibliography:Application Number: JP20200120078