INSPECTION DEVICE AND INSPECTION METHOD

• Main Authors: SEKI TAKATERU, IMAIZUMI TAKAMASA, YOSHIMURA KAZUSHI, HAYASHI HIROYUKI
• Format: Patent
• Language: English; Japanese
• Published: 17.01.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide an inspection device and an inspection method that can achieve improvement in productivity with respect to an inspection of an object to be inspected.SOLUTION: An inspection device and an inspection method of the present invention comprise: an imaging step of sequentially changing a first illumination condition serving as an illumination condition of light with which an object to be inspected is irradiated while the object to be inspected is rotated once, and a second illumination condition higher in illuminance than the first illumination condition, and imaging an outer peripheral surface of the object to be inspected at a timing of the first illumination condition and at a timing of the second illumination condition; an image data processing step of combining a plurality of image data imaged at the timing of the first illumination condition to acquire first image data, and combining a plurality of image data imaged at the timing of the second illumination condition to acquire second image data; a defect detection step of detecting a defect of the outer peripheral surface of the object to be inspected on the basis of the first image data and the second image data.SELECTED DRAWING: Figure 1 【課題】 被検査物の検査に対する生産性の向上が図れる検査装置および検査方法を提供すること。【解決手段】 本発明の検査装置および検査方法は、被検査物が一回転される間に、被検査物に照射される光の照明条件である、第１照明条件と、第１照明条件より照度が高くなる第２照明条件と、を連続的に変更し、かつ第１照明条件のタイミング、および第２照明条件のタイミングで被検査物の外周面を撮像する撮像ステップと、第１照明条件のタイミングで撮像された複数の画像データを結合して第１画像データを取得し、および第２照明条件のタイミングで撮像された複数の画像データを結合して第２画像データを取得する画像データ処理ステップと、第１画像データ、および第２画像データに基づいて被検査物の外周面の欠陥を検出する欠陥検出ステップと、を備える。【選択図】 図１