STORAGE MODULE, SUBSTRATE PROCESSING SYSTEM, AND METHOD FOR CONVEYING CONSUMABLE MEMBER

• Main Authors: AMIKURA NORIHIKO, KITA MASATOMO
• Format: Patent
• Language: English; Japanese
• Published: 06.01.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a storage module, a substrate processing system, and a method for conveying a consumable member that can reduce a footprint.SOLUTION: A storage module has a placement table, a sensor, a rotating unit, a storage unit, and a raising and lowering unit. A consumable member is placed on the placement table. The sensor detects the direction of the consumable member. The rotating unit rotates the consumable member in a predetermined direction based on the direction of the consumable member detected by the sensor. The storage unit is located below the placement table and stores the consumable member. The raising and lowering unit raises and lowers the storage unit.SELECTED DRAWING: Figure 2 【課題】フットプリントを低減することができる収納モジュール、基板処理システムおよび消耗部材の搬送方法を提供する。【解決手段】収納モジュールは、載置台と、センサと、回転部と、収納部と、昇降部とを有する。載置台は、消耗部材を載置する。センサは、消耗部材の向きを検出する。回転部は、センサによって検出された消耗部材の向きに基づいて、消耗部材を所定の向きに回転させる。収納部は、載置台の下部に位置し、消耗部材を収納する。昇降部は、収納部を昇降させる。【選択図】図２