ULTRASONIC THICKNESS MEASURING INSTRUMENT AND GRINDING DEVICE

• Main Authors: MASADA TAKAYUKI, AOKI MASASHI
• Format: Patent
• Language: English; Japanese
• Published: 04.01.2022
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PERFORMING OPERATIONS; PHYSICS; POLISHING; SEMICONDUCTOR DEVICES; TESTING; TRANSPORTING

To measure a thickness of an object to be measured with high accuracy.SOLUTION: An ultrasonic thickness measuring instrument includes: a fluid supply unit that forms a film-like fluid layer on an object to be measured; an ultrasonic transmitting/receiving unit that can transmit an ultrasonic through the fluid layer toward the object to be measured and receive a reflected wave of the ultrasonic; and a thickness calculation unit that calculates a thickness of the object to be measured on the basis of the waveform of the ultrasonic received by the ultrasonic transmitting/receiving unit. The thickness calculation unit calculates the thickness of the object to be measured on the basis of a difference between a time when a first reflected wave reaches the ultrasonic transmitting/receiving unit, which enters the object to be measured from an upper surface, is reflected by a lower surface of the object to be measured, and enters the outside of the object to be measured from the upper surface, and a time when a second reflected wave reaches the ultrasonic transmitting/receiving unit, which enters the object to be measured from the upper surface, is reflected on the lower surface of the object to be measured, is reflected on the upper surface, is reflected again on the lower surface, and enters the object to be measured from the upper surface to the outside of the object.SELECTED DRAWING: Figure 3 【課題】測定対象物の厚さを高精度に測定する。【解決手段】超音波厚さ測定器であって、測定対象物上に膜状の流体層を形成する流体供給ユニットと、該測定対象物に向けて該流体層を介して超音波を送波できるとともに該超音波の反射波を受波できる超音波送受波ユニットと、該超音波送受波ユニットで受波された超音波の波形から該測定対象物の厚さを算出する厚さ算出部と、を備え、該厚さ算出部は、該上面から該測定対象物中に進出し、該測定対象物の下面で反射され、該上面から該測定対象物の外部に進出して該超音波送受波ユニットに到達した第１の反射波と、該上面から該測定対象物中に進出し、該測定対象物の該下面で反射され、該上面で反射され、該下面で再び反射され、該上面から該測定対象物の外部に進出して該超音波送受波ユニットに到達した第２の反射波と、の該超音波送受波ユニットに到達する時間の差に基づいて該測定対象物の厚さを算出する。【選択図】図３