LAMINATE ELECTROSTATIC ACTUATOR

• Main Authors: SANEYOSHI KEIJI, IMAI YUICHI, ITO MAKOTO, OKUDA KAZUO, UCHI TOMIO, IZUMITANI HIKARU
• Format: Patent
• Language: English; Japanese
• Published: 27.12.2021
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION

To provide a laminate electrostatic actuator which exerts a sufficient stroke and contractive force.SOLUTION: A laminate electrostatic actuator 1 is constituted by connecting and laminating a plurality of actuator parts 2a, 2b, 2c composed of first films 3a1, 3b1, 3c1 on one side of which a plurality of first connection areas are formed by a predetermined pattern, and second films 3a2, 3b2, 3c2 connected with the first films via the first connection areas, and on the opposite side of the first films of which a plurality of second connection areas of the same pattern are formed, via the second connection areas. In both of the first films and the second films of one actuator part, a non-connection area 15 with substantially fixed width is formed between the adjacent connection areas seen from the lamination direction, the first connection areas and the second connection areas are arranged so as not to overlap with each other when seen from the lamination direction, and axes of the patterns between the two actuator parts to be connected cross each other at a predetermined angle θ when seen from the lamination direction.SELECTED DRAWING: Figure 1 【課題】充分なストロークと収縮力を発揮する積層型静電アクチュエータ提供する。【解決手段】積層型静電アクチュエータ１は、一方の面に複数の第１接続領域が所定パターンで形成された第１フィルム３ａ１，３ｂ１，３ｃ１と、第１接続領域を介して第１フィルムに接続され、第１フィルムとは反対側の面に同一パターンの複数の第２接続領域が形成された第２フィルム３ａ２，３ｂ２，３ｃ２と、から構成された複数のアクチュエータ部２ａ，２ｂ，２ｃが、第２接続領域を介して接続され積層されて構成される。１つのアクチュエータ部の第１フィルム及び第２フィルムはいずれも積層方向から見て隣り合う接続領域間に幅が実質的に一定の非接続領域１５が形成され、第１接続領域と第２接続領域とは積層方向から見て互いに重ならないように配置され、接続される２つのアクチュエータ部間のパターンの軸線は積層方向から見て互いに所定角度θで交差する。【選択図】図１