IMPRINT METHOD, IMPRINT DEVICE, AND METHOD FOR MANUFACTURING ARTICLE
To provide a technique advantageous for making uniform the size of droplets of imprint material arranged on a substrate.SOLUTION: An imprint method is for forming a pattern of imprint material on a substrate by using a mold, and the imprint method includes: a first step of having a function to allow...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
25.11.2021
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Subjects | |
Online Access | Get full text |
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