LAMINAR OBJECT THICKNESS MEASUREMENT METHOD

• Main Authors: KUROKAWA SATORU, TOBA YOSHIKAZU
• Format: Patent
• Language: English; Japanese
• Published: 25.11.2021
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a laminar object thickness measurement method that can have a sufficient measurement speed and can be flexibly adaptive to change in measurement target film thickness etc.SOLUTION: There is provided a method of measuring a thickness of a laminar object for example, a dielectric film 2 which is layered on a metal plate 1, and transmits at least a part of a microwave. The method comprises a microwave transmission/reception device 3 having: a horn antenna 5 as a transmission/reception antenna; and a transmission/reception circuit 6 which generates and supplies an electric signal of a microwave to the horn antenna 5, and receives as input, the electric signal of the microwave received by the horn antenna 5. The laminar object thickness measurement method includes: making the microwave 7 incident substantially vertically on a surface of the dielectric film 2 while sweeping a frequency; detecting a frequency at which a reflected wave 8 from the dielectric film 2 has maximum or minimum intensity; and calculating a thickness of the dielectric film 2 based upon the detected frequency.SELECTED DRAWING: Figure 1 【課題】十分な測定速度が得られ、測定膜厚の変化等に対して柔軟に対応可能な層状物体厚さ測定方法を提供する。【解決手段】金属板１上に層状に設置されたマイクロ波を少なくとも一部透過する層状物体、例えば誘電体膜２の厚さを測定する方法であって、送受信アンテナであるホーンアンテナ５と、マイクロ波の電気信号を発生してホーンアンテナ５に供給し、ホーンアンテナ５により受信されたマイクロ波の電気信号が入力される送受信回路６と、を有するマイクロ波送受信装置３を備え、誘電体膜２の表面にほぼ垂直に周波数を掃引しながらマイクロ波７を入射して、誘電体膜２から反射される反射波８の強度が極小、又は極大となる周波数を検出し、その検出した周波数に基づいて誘電体膜２の厚さを算出する。【選択図】図１