MULTI-BEAM IMAGE GENERATION DEVICE AND MULTI-BEAM IMAGE GENERATION METHOD

PURPOSE: To provide a multi-beam image generation device and a multi-beam image generation method that generate a plurality of primary electron beams, move a sample while irradiating the sample with the primary electron beams, separate a plurality of secondary electron beams emitted at that time by...

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Bibliographic Details
Main Author YAMADA KEIZO
Format Patent
LanguageEnglish
Japanese
Published 01.11.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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