STAGE DEVICE, AND STAGE CONTROL DEVICE

• Main Authors: KONDO AKIRA, WATANABE MARINO, YOSHIDA TATSUYA, HAMADA SHINYA
• Format: Patent
• Language: English; Japanese
• Published: 11.10.2021
• Subjects: BLASTING; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR; FLUID-PRESSURE ACTUATORS; FLUID-PRESSURE ACTUATORS, e.g. SERVO-MOTORS; HEATING; HYDRAULICS OR PNEUMATICS IN GENERAL; LIGHTING; MECHANICAL ENGINEERING; SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; WEAPONS

To propose a safety stop mechanism dedicated to a stage device for moving work by using an air actuator, and provide the stage device comprising the safety stop mechanism.SOLUTION: A stage device comprises a guide 122, a slider 124, a positive side servo valve 126P for controlling a pressure in one chamber 152 by supplying fluid to the chamber 152 or discharging the fluid in the chamber 152, and a negative side servo valve 126N for controlling a pressure in a chamber 154 by supplying the fluid to the chamber 154 or discharging the fluid in the chamber 154. A pair of cutoff valves 170P and 170N are provided in a supply flow passage of the fluid to the chamber 152 and a supply flow passage to the chamber 154, or a discharge flow passage of the fluid from the chamber 152 and a discharge flow passage from the chamber 154 respectively. The cutoff valve 170P is connected in series with the positive side servo valve 126P. The cutoff valve 170N is connected in series with the negative side servo valve 126N.SELECTED DRAWING: Figure 5 【課題】エアアクチュエータを用いてワークを移動させるステージ装置に特化した安全停止機構を提案し、このような安全停止機構を備えたステージ装置を提供する。【解決手段】ステージ装置は、ガイド１２２と、スライダ１２４と、流体をチャンバ１５２に供給し、又はチャンバ１５２内の流体を排出して一方のチャンバ１５２内の圧力を制御する正側サーボバルブ１２６Ｐと、流体をチャンバ１５４に供給し、又はチャンバ１５４内の流体を排出してチャンバ１５４内の圧力を制御する負側サーボバルブ１２６Ｎと、を備え、一組の遮断弁１７０Ｐ，１７０Ｎがそれぞれ、流体のチャンバ１５２への供給流路及びチャンバ１５４への供給流路に、または流体のチャンバ１５２からの排出流路及びチャンバ１５４からの排出流路に設けられ、遮断弁１７０Ｐが正側サーボバルブ１２６Ｐと直列に接続され、遮断弁１７０Ｎが負側サーボバルブ１２６Ｎと直列に接続されている。【選択図】図５