TRANSPORT DEVICE

• Main Authors: SHINDO TAKEHIRO, WAKABAYASHI SHINJI
• Format: Patent
• Language: English; Japanese
• Published: 07.10.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

To provide a technology that can suppress unstable operation of a transport device.SOLUTION: A transport device according to the present disclosure installed in a vacuum transport chamber includes a structure body including an internal space isolated from the vacuum transfer chamber, an arm that rotates with respect to the structure body, and a vacuum seal structure that airtightly seals a sliding portion between the structure body and the arm, and the vacuum seal structure includes a seal member provided on the sliding portion, an encapsulation portion formed by the structure body, the arm, and the sealing member and in which a lubricant is sealed, and a pressure adjusting portion that adjusts the internal pressure of the sealing portion.SELECTED DRAWING: Figure 2 【課題】搬送装置の動作が不安定になることを抑制できる技術を提供する。【解決手段】本開示の一態様による搬送装置は、真空搬送室内に設けられる搬送装置であって、前記真空搬送室と隔離された内部空間を含む構造体と、前記構造体に対して回転するアームと、前記構造体と前記アームとの間の摺動部を気密にシールする真空シール構造と、を有し、前記真空シール構造は、前記摺動部に設けられるシール部材と、前記構造体、前記アーム及び前記シール部材により形成され、潤滑剤が封入される封入部と、前記封入部の内圧を調整する圧力調整部と、を含む。【選択図】図２