AIR CONDITIONER

To provide an air conditioner which realizes a measurement environment in which an optical measuring apparatus performs measurement accurately.SOLUTION: An air conditioner 1 includes: a booth 10 which houses a laser interferometer 2 and in which an opening 11 is formed on a side surface; a fan unit...

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Bibliographic Details
Main Author MIURA KOJI
Format Patent
LanguageEnglish
Japanese
Published 07.10.2021
Subjects
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
APPARATUS SPECIALLY ADAPTED THEREFOR
BLASTING
CINEMATOGRAPHY
ELECTROGRAPHY
HEATING
HOLOGRAPHY
LIGHTING
MATERIALS THEREFOR
MECHANICAL ENGINEERING
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
RANGES
VENTILATING
WEAPONS
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Summary:To provide an air conditioner which realizes a measurement environment in which an optical measuring apparatus performs measurement accurately.SOLUTION: An air conditioner 1 includes: a booth 10 which houses a laser interferometer 2 and in which an opening 11 is formed on a side surface; a fan unit 20 which supplies purified airflow; an air supply duct 30 which discharges the airflow into the booth 10; and an exhaust duct 40 which exhausts the airflow discharged from the air supply duct 30 to the outside of the booth 10. Flow of the airflow is set to cross an optical path of the laser interferometer 2.SELECTED DRAWING: Figure 1 【課題】光学測定装置が精度良く測定を行える測定環境を実現する空調装置を提供する。【解決手段】空調装置１は、レーザー干渉計２を収容して側面に開口部１１が形成されたブース１０と、清浄化された空気流を供給するファンユニット２０と、空気流をブース１０内に放出する給気ダクト３０と、給気ダクト３０から放出された空気流をブース１０外に排気する排気ダクト４０と、を備えている。空気流の流れは、レーザー干渉計２の光路を横断するように設定されている。【選択図】図１
Bibliography:Application Number: JP20200059143