METHOD FOR DETECTING VARIATION IN HEIGHT OF MOVABLE SURFACE OF ACTUATOR

• Main Author: YANAI AKIO
• Format: Patent
• Language: English; Japanese
• Published: 07.10.2021
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

To provide a method for detecting variation in height of multiple actuators in a polishing head.SOLUTION: A method for detecting variation in height of a movable surface of an actuator includes the steps of: measuring a height of movable surfaces 47a of multiple actuators 47 using a distance measuring tool 70 while causing a polishing head 7 including the multiple actuators 47 and the distance measuring tool 70 to move relatively to each other; generating an image of the movable surfaces 47a of the multiple actuators 47 using an imaging device; and detecting variation in height of the multiple actuators 47 on the basis of a pattern on the movable surfaces 47a which appears in the image.SELECTED DRAWING: Figure 4 【課題】研磨ヘッド内の複数のアクチュエータの高さのばらつきを検出する方法を提供する。【解決手段】本方法は、複数のアクチュエータ４７を有する研磨ヘッド７と、距離測定器７０を相対的に移動させながら、距離測定器７０により複数のアクチュエータ４７の可動面４７ａの高さを測定する。本方法は、撮像装置により複数のアクチュエータ４７の可動面４７ａの画像を生成し、画像に現れる可動面４７ａ上の模様に基づいて複数のアクチュエータ４７の高さのばらつきを検出する。【選択図】図４