MAGNETIC SENSOR AND MANUFACTURING METHOD THEREOF

• Main Author: HARATANI SUSUMU
• Format: Patent
• Language: English; Japanese
• Published: 30.09.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

To apply a magnetic bias to a magnetoresistive effect element without segmenting the magnetoresistive effect element.SOLUTION: A magnetic sensor 10 comprises: magnetoresistive effect elements R1-R4 extending in a y direction, with an x direction defined to be a fixed magnetization direction; and a magnetization direction control film 55 laminated on the magnetoresistive effect elements R1-R4 for giving a magnetic bias to the magnetoresistive effect elements R1-R4 in the x direction. Since the magnetization direction control film 55 for giving the magnetic bias to the magnetoresistive effect elements R1-R4 is laminated on the magnetoresistive effect elements R1-R4, the magnetoresistive effect elements R1-R4 are not needed to be segmented by a plurality of hard magnetic materials. Thereby, irregular noises superimposed on a detection signal can be reduced while an increase of noise density is suppressed.SELECTED DRAWING: Figure 5 【課題】磁気抵抗効果素子を分断することなく、磁気抵抗効果素子に磁気バイアスを印加する。【解決手段】磁気センサ１０は、ｙ方向に延在しｘ方向を固定磁化方向とする磁気抵抗効果素子Ｒ１〜Ｒ４と、磁気抵抗効果素子Ｒ１〜Ｒ４に積層され、磁気抵抗効果素子Ｒ１〜Ｒ４にｘ方向の磁気バイアスを与える磁化方向制御膜５５とを備える。このように、磁気抵抗効果素子Ｒ１〜Ｒ４に磁気バイアスを与える磁化方向制御膜５５が磁気抵抗効果素子Ｒ１〜Ｒ４に積層されていることから、複数の硬磁性体によって磁気抵抗効果素子Ｒ１〜Ｒ４を分断する必要がない。これにより、雑音密度の増加を抑えつつ、検出信号に重畳する不規則ノイズを低減することが可能となる。【選択図】図５