FOULING SUBSTANCE DETECTION SENSOR, FOULING SUBSTANCE QUANTITY MEASURING DEVICE, AND FOULING SUBSTANCE QUANTITY MEASURING METHOD

• Main Authors: HARAGUCHI SATOSHI, MIZUIDE TAKASHI, CHAEN YUTAKA, KAKUMOTO YUICHI, CHO HIROAKI
• Format: Patent
• Language: English; Japanese
• Published: 27.09.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a fouling substance detection sensor, a fouling substance quantity measuring device, and a fouling substance quantity measuring method, which can measure the sticking amount of fouling substance with good accuracy.SOLUTION: The fouling substance detection sensor of an embodiment comprises: a first and a second crystal vibrator arranged in mutually the same environment; a first frequency oscillation unit and a first frequency measurement unit connected to the first crystal vibrator; and a second frequency oscillation unit and a second frequency measurement unit connected to the second crystal vibrator. The first crystal vibrator includes a first electrode that contains first metal. The second crystal vibrator includes a second electrode that contains second metal. When a fouling substance sticks to the second electrode, the second metal exhibits the action of causing the second resonance frequency outputted by the second crystal vibrator to change in relation to the first resonance frequency outputted by the first crystal vibrator.SELECTED DRAWING: Figure 1 【課題】汚損物質の付着量を精度よく測定することができる汚損物質検出センサ、汚損物質量測定装置および汚損物質量測定方法を提供することである。【解決手段】実施形態の汚損物質検出センサは、互いに同一の環境に配置される第一水晶振動子と第二水晶振動子と、前記第一水晶振動子に接続する第一周波数発振部と第一周波数計測部、および前記第二水晶振動子に接続する第二周波数発振部と第二周波数計測部を持つ。前記第一水晶振動子は第一金属を含む第一電極を備える。前記第二水晶振動子は第二金属を含む第二電極を備える。前記第二金属は、前記第二電極に汚損物質が付着したときに、前記第二水晶振動子が出力する第二共振周波数を、前記第一水晶振動子が出力する第一共振周波数に対して変化させる作用を有する。【選択図】図１