SEMICONDUCTOR DEVICE

To provide a semiconductor device that can easily obtain a resistance element with excellent accuracy and reliability.SOLUTION: A semiconductor device according to an embodiment includes: a semiconductor substrate 10 including a main surface including a first surface part 11 and a second surface par...

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Bibliographic Details
Main Authors INATSUKA TAKUYA, NOJIMA KAZUHIRO, KUBOTA YOSHIHIRO
Format Patent
LanguageEnglish
Japanese
Published 16.09.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:To provide a semiconductor device that can easily obtain a resistance element with excellent accuracy and reliability.SOLUTION: A semiconductor device according to an embodiment includes: a semiconductor substrate 10 including a main surface including a first surface part 11 and a second surface part 12 existing lower than the first surface part; and a resistor element 100a including a first insulating layer 21a including a part provided on the second surface part, a first semiconductor layer 22a provided on the first insulating layer, including a part provided above the second surface part, and functioning as a resistor, and a second insulating layer 23a provided on the first semiconductor layer and provided above the second surface part.SELECTED DRAWING: Figure 1 【課題】精度や信頼性に優れた抵抗素子を容易に得ることが可能な半導体装置を提供する。【解決手段】実施形態に係る半導体装置は、第１の表面部分１１及び第１の表面部分よりも低く位置する第２の表面部分１２を含む主面を有する半導体基板１０と、第２の表面部分上に設けられた部分を含む第１の絶縁層２１ａと、第１の絶縁層上に設けられ、第２の表面部分の上方に設けられた部分を含み且つ抵抗として機能する第１の半導体層２２ａと、第１の半導体層上に設けられ且つ第２の表面部分の上方に設けられた第２の絶縁層２３ａとを含む抵抗素子１００ａとを備える。【選択図】図１
Bibliography:Application Number: JP20200040143