METHOD FOR INSPECTING IRREGULARITY OF SURFACE OF INSPECTION OBJECT

• Main Authors: YAMADA TAKAYA, SAIGO TOMOYASU
• Format: Patent
• Language: English; Japanese
• Published: 13.09.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide an inspection method that can surely discover minute irregularity of an inspection object surface.MEANS FOR SOLVING THE PROBLEM: A method is configured to: irradiate a wave surface modulation element 90 with light irradiated from a light source 10; irradiate a holographic diffraction optical element 20 with light having a phase or amplitude modulated by the wave surface modulation element 90; irradiate an inspection object 50 with light converted into parallel light at a prescribed angle for each of a plurality of colors and for each color by the holographic diffraction optical element 20; detect reflection light 40 from a surface 51 of the inspection object 50 by a detection unit 60; and inspect irregularity of the surface of the inspection object 50 by a change in color of a part of the irregularity of the surface of the inspection object 50 in the reflection light 40, and a surface other than the irregularity thereof.SELECTED DRAWING: Figure 1 【課題】検査対象物表面の微小な凹凸を確実に発見できる検査方法を提供する。【課題を解決するための手段】光源１０から放射された光を波面変調素子９０に照射し、波面変調素子９０によって位相、又は振幅が変調された光を、ホログラフィック回折光学素子２０に照射し、ホログラフィック回折光学素子２０によって、複数の色毎に所定の角度で、且つ色毎に平行光に変換された光を検査対象物５０に照射し、検査対象物５０の表面５１からの反射光４０を検出部６０で検出し、反射光４０における検査対象物５０の表面の凹凸の部分と、凹凸以外の表面との色の変化によって検査対象物５０の表面の凹凸を検査する。【選択図】図１