SEMICONDUCTOR DEVICE

To provide a semiconductor device capable of improving connection reliability of wiring formed on a semiconductor lamination structure including a layer having at least two different kinds of compositions.SOLUTION: A semiconductor light-emitting device 1 includes a base layer 16, a mesa part 13 incl...

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Bibliographic Details
Main Authors NAKANISHI YASUO, MUGINO YOICHI
Format Patent
LanguageEnglish
Japanese
Published 30.08.2021
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Summary:To provide a semiconductor device capable of improving connection reliability of wiring formed on a semiconductor lamination structure including a layer having at least two different kinds of compositions.SOLUTION: A semiconductor light-emitting device 1 includes a base layer 16, a mesa part 13 including a layer having at least two different kinds of compositions laminated on the base layer 16, and metal wiring 27 led out to a lead-out part 14 from an apex of the mesa part 13 through a side part of the mesa part 13. The meta part 13 includes a first side surface 17B, a second side surface 18B crossing the first side surface 17B, and a wiring arrangement part 19 in which the metal wiring 27 is arranged. The metal wiring 27 strides over an intersection 29 between the first side surface 17B and the second side surface 18B of the wiring arrangement part 19, and covers the first side surface 17B and the second side surface 18B.SELECTED DRAWING: Figure 1 【課題】少なくとも2種以上の異なる組成を有する層を含む半導体積層構造上に形成された配線の接続信頼性を向上することができる半導体装置を提供する。【解決手段】半導体発光装置1は、べース層16と、ベース層16上に積層された少なくとも2種以上の異なる組成を有する層を含むメサ部13と、メサ部13の頂部からメサ部13の側部を通って引き出し部14に引き出された金属配線27とを含み、メサ部13は、第1側面17Bおよび第1側面17Bに交差する第2側面18Bを有し、金属配線27が配置された配線配置部19を含み、金属配線27は、配線配置部19の第1側面17Bと第2側面18Bとの間の交差部29に跨り、かつ第1側面17Bおよび第2側面18Bを覆っている。【選択図】図1
Bibliography:Application Number: JP20200018996