WAFER CONVEYANCE UNIT AND WAFER CONVEYANCE METHOD
To properly hold a wafer during conveyance without interfering with each function of a semiconductor failure analysis device.SOLUTION: A failure analysis unit 10 is a wafer conveyance unit that conveys a wafer W while holding the wafer in a semiconductor failure analysis device, and includes: a moun...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
10.08.2021
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Subjects | |
Online Access | Get full text |
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