WAFER CONVEYANCE UNIT AND WAFER CONVEYANCE METHOD
To properly hold a wafer during conveyance without interfering with each function of a semiconductor failure analysis device.SOLUTION: A failure analysis unit 10 is a wafer conveyance unit that conveys a wafer W while holding the wafer in a semiconductor failure analysis device, and includes: a moun...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
10.08.2021
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Subjects | |
Online Access | Get full text |
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Summary: | To properly hold a wafer during conveyance without interfering with each function of a semiconductor failure analysis device.SOLUTION: A failure analysis unit 10 is a wafer conveyance unit that conveys a wafer W while holding the wafer in a semiconductor failure analysis device, and includes: a mounting stand 11 that secures a wafer W at a predetermined observation position; and a wafer chuck 12 that conveys the wafer W to the observation position while holding the wafer. The wafer chuck 12 has a plurality of holding members (protruding sections 12x, 12x, 12y, 12y) provided so as to face the side surface of the wafer W, and holds the wafer W through the gripping of the periphery of the wafer W by the plurality of holding members.SELECTED DRAWING: Figure 1
【課題】半導体故障解析装置の各機能を妨げることなく、搬送中のウェハを適切に保持すること。【解決手段】故障解析ユニット10は、半導体故障解析装置においてウェハWを保持しながら搬送するウェハ搬送ユニットであって、所定の観察位置にウェハWを固定する載置台11と、観察位置までウェハWを保持しながら搬送するウェハチャック12と、を備え、ウェハチャック12は、ウェハWの側面と対向するように設けられた複数の保持部材(突出部12x,12x,12y,12y)を有し、複数の保持部材によってウェハWの周部を挟持することによりウェハWを保持する。【選択図】図1 |
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Bibliography: | Application Number: JP20200009273 |